spr802應用機型：ulvac
spr806應用機型：ulvac
spr807應用機型：ulvac
spr809應用機型：ulvac
spr811應用機型：ulvac
| 型式 | repair | overhaul | exchange |
| daihen spr802 |  | | |
| daihen spr806 | | | |
| daihen spr807 | | | |
| daihen spr809 | | | |
| daihen spr811 | | | |
| daihen spr806s | | | |
| daihen spr811s | | | |
| daihen spr8101 | | | |
| daihen spr8501 | | | |
| daihen spr805 | | |