pre-200/200b/201/201b應用機型:for 8 ” wafer
pre-300/300b/301/301b應用機型:for 12 ” wafer
型式 | repair | overhaul | exchange |
pre-200 | |||
pre-200b | |||
pre-201 | |||
pre-201b | |||
pre-300 | |||
pre-300b | |||
pre-301 | |||
pre-301b |
pre-200/200b/201/201b應用機型:for 8 ” wafer
pre-300/300b/301/301b應用機型:for 12 ” wafer
型式 | repair | overhaul | exchange |
pre-200 | |||
pre-200b | |||
pre-201 | |||
pre-201b | |||
pre-300 | |||
pre-300b | |||
pre-301 | |||
pre-301b |