| 產品名稱 | pre-aligner |
| 產品編號 | pre-aligner |
產品介紹
pre-200/200b/201/201b應用機型：for 8 ” wafer
pre-300/300b/301/301b應用機型：for 12 ” wafer
| 型式 | repair | overhaul | exchange |
| pre-200 |  | | |
| pre-200b | | | |
| pre-201 | | | |
| pre-201b | | | |
| pre-300 | | | |
| pre-300b | | | |
| pre-301 | | | |
| pre-301b | | | |
| 產品名稱 | pre-aligner |
| 產品編號 | pre-aligner |
pre-200/200b/201/201b應用機型：for 8 ” wafer
pre-300/300b/301/301b應用機型：for 12 ” wafer
| 型式 | repair | overhaul | exchange |
| pre-200 | | | |
| pre-200b | | | |
| pre-201 | | | |
| pre-201b | | | |
| pre-300 | | | |
| pre-300b | | | |
| pre-301 | | | |
| pre-301b | | | |