xu-rcm53e0應用機型：ebara cmp wet robot
xu-rcm53e0a應用機型：ebara cmp dry robot
xu-rcm5301應用機型：ebara cmp wet robot
xu-rcm5300應用機型：ebara cmp wet robot
xu-rcm5301a應用機型：ebara cmp dry robot
| 型式 | repair | overhaul | exchange |
| yaskawa xu-rcm53e0 |  | | |
| yaskawa xu-rcm53e0a | | | |
| yaskawa xu-rcm5301 | | | |
| yaskawa xu-rcm5300 | | | |
| yaskawa xu-rcm5301a | | |